The invention provides a two-layer flexible substrate which is free from surface defects, while being excellent in flexural strength, etching characteristics and adhesion to a resist.
本发明的课题在于提供一种耐折性、蚀刻特性、与抗蚀剂的粘合性优异、没有表面缺陷的两层挠性基板。
The diffusion of Ti, c, W of the substrate into the film improved the adhesion strength of the interface.
基体中的元素在薄膜中有明显的扩散，有助于提高界面结合强度。
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