The principle and control algorithm of temperature compensation for Sub Micron projection lithography objectives are introduced.
主要介绍一种光刻机投影物镜温度补偿控制的原理及控制算法。
In order to maintain the flue temperature and guarantee the gas can combustion fully, gas pressure control loop and the sub flue suction control loop are designed.
为了控制炉温的稳定及煤气的充分合理燃烧，设计压力控制回路、吸力控制回路使煤气量和空气量稳定在设定值上。
This project is a sub-project from an academic institution, where an automatic measurement and control system is required to test active temperature and revertive temperature.
本项目是某预研项目的子课题，该子课题要求研制一种测试固体温度继电器动作温度和回复温度的自动测控系统。
应用推荐