The principle and control algorithm of temperature compensation for Sub Micron projection lithography objectives are introduced.
主要介绍一种光刻机投影物镜温度补偿控制的原理及控制算法。
In order to maintain the flue temperature and guarantee the gas can combustion fully, gas pressure control loop and the sub flue suction control loop are designed.
为了控制炉温的稳定及煤气的充分合理燃烧，设计压力控制回路、吸力控制回路使煤气量和空气量稳定在设定值上。
HY329FH is an intelligent sub-periods, to achieve the double temperature double control of the temperature control products.
HY329FH是一款智能型分时段，能实现双温双控的温度控制的产品。
应用推荐