Investigated were the effects of substrate temperature on the structures and surface morphology, dielectric properties of films.
研究了衬底温度对薄膜结构、表面形貌以及介电性能的影响。
The structures and surface morphology of coating and oxide film were characterized using X-ray diffraction and scanning electron microscopy.
利用X射线衍射和扫描电镜研究涂层和氧化物膜的结构和表面微观形貌。
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