MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
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