• 条形光波导 - 引用次数：2

  Well patterned strip optical waveguides with a width of 15μm was fabricated using optimized processing and chemical etching parameters. The transect profile of the strip optical waveguide is close to that of the trapezia.

  通过优化直写和化学腐蚀工艺参数,能得到了线度为15μm且成型良好的条形光波导,波导的横截面轮廓接近于梯形。

  参考来源 - 激光直写法制备SiO

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