sputtering deposition technology
sputtering deposition technology
溅射沉积技术
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Reviewed were the effects of various deposition conditions on microstructural, electrical and optical properties of AlN films grown by magnetron sputtering deposition technology.
综述了各种沉积条件对磁控溅射技术生长氮化铝薄膜的微观结构，电学以及光学性能的影响。
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