A method detecting and measuring the intensity of spectrum from laser plasma soft X-ray source is presented.
提出了一种新的探测和测量激光等离子体软X射线源光谱强度的方法。
The most attractive one is high order harmonic generation (HHG), which can be used as a source of extreme ultraviolet (XUV) and soft X-ray lasers.
其中高阶谐振的产生，由于可以作为产生真空远紫外线和软X射线的可能途径，受到人们的极大关注。
Using high - power pulsed laser - produced plasma as soft X - ray source for approach lithography is described in this paper.
描述了用高功率脉冲激光打靶产生的等离子体作为软x射线源而进行的接近式软x射线光刻研究。
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