soft lithography 软微影技术 ; 软刻蚀 ; 软光刻技术 ; 软光刻
multilayer soft lithography 多层软蚀刻技术
soft-lithography 软光刻
Research on Soft-lithography-based Short-range Optic 基于软光刻的短距离光互连研究
lift-up soft lithography 揭起软光刻技术
muti-layer soft lithography 多层软蚀刻
soft contact lithography 软接触式光刻
soft interference lithography 软性干涉光刻技术 ; 干涉光刻技术
This paper will emphasize on the application of soft lithography in the fabrication of μ-TAS.
本论文讨论的重点便是将软光刻技术引入到微全分析系统的加工之中。
参考来源 - 微全分析系统中微传递成模软光刻技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
以上来源于: WordNet
As a newly coming micro fabrication technology, soft lithography use elastomeric stamp to replace hard stamp in traditional lithography to fabricate micro patterns and structures.
作为一种新型的微图形复制技术，软光刻技术用弹性模替代传统光刻技术中使用的硬模来产生微形状和微结构。
The process of SU-8 photoresist lithography is researched, and the influence of steps like coating and soft-bake on the lithography is studied.
初步研究了SU-8胶的光刻工艺流程，讨论了涂胶、前烘等各个步骤对光刻结果的影响。
A sheet molded with hundreds of perforations, from 10 to 100 microns across, can be manufactured using soft lithography and set down on another surface.
他们可以利用软微影术制造一片东西，上面戳有数百个直径10 ~ 100微米的小孔，然后将之覆盖在另一表面上。
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