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Typical results from these tests show that filtration of newer ceria and alumina, and historic silica CMP slurries is beneficial in managing large particles.
由这些测试的典型结果现实，更新的氧化铈和氧化铝以及固有的二氧化硅CMP浆料的过滤有利于大颗粒的控制。
The influences of various thin slurries with different solid particle sizes on filtration intensity are discussed.
实验研究了不同分级粒径对过滤强度的影响。
In this paper, we describe filtration methodology and approaches for new generation CMP slurries.
叙述了新一代CMP浆料的过滤工艺和方法。
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