The frequency responses of the system combing probe tip and piezo chip were detected, the difference between the shear force detection and the tapping mode detection was discussed.
文中给出了探针-压电片检测系统的的频率特性，并比较了剪切力探测和轻敲模式探测特性的区别。
Shear force detection is carried out by using a symmetric piezoelectric bimorph sensor, which provides an easy way not only for probe-surface distance control but also for imaging.
利用结构对称的双压电陶瓷传感器实现了切变力的探测，并为探针-样品的间距控制与成像提供了一种有效手段。
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