several sub systems 若干个子系统
Within the system are several sub-systems.
系统内部又分了几个子系统。
The industry control system often need connect several control sub systems, which use one main device, for example PC, to send commands and get data, and is connected to become a special network.
工控系统常需将各个控制子系统连接起来，用一台主要设备（如PC机）来发出命令和收集数据，形成一个专用网络。
The integrated systems range up to several hundred micrometers, and its sensitivity reaches nanometer, sub-nanometer or even pico-meters (10-12 m).
本集成系统的量程高达几百个微米，而它的灵敏度却可以达到纳米、亚纳米，甚至皮米(10 - 12 m)。
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