... 伺服控制扫描干涉仪：servocontrolled scanning interferometer 伺服控制镜：servo-control mirror 伺服调谐：servo-tuning ...
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servo-control mirror
伺服反射镜
以上为机器翻译结果，长、整句建议使用 人工翻译 。
The scanning mirror precise servo system is designed by the scheme of compound control of open and closed loops with current, velocity and position loops in this paper.
针对扫描镜精密伺服系统，本文采用按照电流环、速度环和位置环等三个回路进行控制系统设计的开闭环复合控制方案。
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