The structure, principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer (PMSA) are introduced in this paper.

文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。

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In the method, the sensitivity optimum algorithm was adopted and the forming actors of forming ability such as forming ability, rapture, wrinkle were also considered to perfect the algorithm.

该算法以灵敏度优化方法为基础，考虑了板料的成形度、破裂和起皱等成形缺陷。

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The calculated result shows that the sensitivity analysis method gives convenience and a theoretical basis for the partial adjustment of the contactor structure design parameter and optimum design.

实例数值计算结果表明，灵敏度分析法对接触器结构设计参数的局部调整与优化设计提供了一条有效途径与理论依据。

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