• 自对准 - 引用次数：3

  In the fabrication of integrated circuits(IC), the transistor is basic device, and its self-aligned structure and process formation technology of gate and source/drain is the key part of IC manufacturing.

  在集成电路制造领域,晶体管是电路中应用最主要的器件之一,而它的自对准源漏栅工艺是晶体管制造的关键。

  参考来源 - 侧墙TEOS

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