The optical switches includereflective micromirror, self-aligned optical fiber grooves and actuator structure.
主要包括微反射镜,自对准光纤槽以及驱动结构。
参考来源 - 体硅微机械光开关的设计与制作工艺的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
HBT self-aligned technology with a perpendicular side-wall mesa has been proposed.
本文提出了一种制作HBT采用的垂直台面结构自对准工艺。
The process is compatible to the existing double poly-silicon self-aligned NPN transistor process, which can be used to fabricate high-performance complementary bipolar circuits.
该工艺与已有的双层多晶硅自对准NPN晶体管工艺相兼容,可用于制造高性能的互补双极电路。
In addition, the poly tiles themselves increase the thickness of the isolation between active silicon regions when it must serve as a self-aligned blocking layer for an ion implantation step.
另外,当有源硅区之间的隔离必须充当一离子注入步骤的一自行对准阻挡层时,所述多晶硅瓦片本身增加所述隔离的厚度。
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