电子器件投稿系统 关键词： 射频磁控溅射；硼轻掺杂；氢化非晶硅 [gap=871]Keywords: RF magnetron sputtering method; Light-doped Boron; a-Si:H film
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rf magnetron reactive sputtering method 射频磁控反应溅射法
All samples were prepared by rf magnetron sputtering method.
所有样品采用射频辅助磁控溅射方法制备。
High resistance AZO films are fabricated on quartz substrates by radiofrequency (RF) magnetron sputtering deposition method in the environment with high oxygen proportion.
在石英衬底上采用射频磁控溅射的方法制备高电阻azo薄膜，其中高电阻由高氧氩比环境得到。
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