7, removal of the template, pole, support should be promptly removed and properly stacked;
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The methods of removing template are reviewed. Several progresses are summarized and the key problems during removal are pointed out. The method to improve the removal process is presented.
综述了模板剂的脱除方法,总结了已经出现的几种工艺,指出了脱除过程中的关键问题及改进的方向。
For the removal of residual layer after template is released during nanoimprint lithography, a new UV-nanoimprint technology without residual layer based on photolithography mask was proposed.
针对纳米压印光刻技术中压印脱模后的留膜去除问题,提出了一种基于光刻版的无留膜紫外纳米压印技术。
The result showed that direct calcination of MCM-41 samples in the presence of air for template removal caused collapse of the molecular sieve structure and dealumination of the framework was obvious;
结果表明,采用在空气中直接焙烧的方法脱除模板剂在一定的程度上破坏了MCM-41分子筛的结构完整性,骨架脱铝现象最明显;
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