In synchrotron radiation X-Ray lithography, distortion of mask is caused by its initial tension, stress and inhomogeneous thermal effect.

在同步辐射X射线光刻中，由于掩模的初始张应力和掩膜的非均匀受热将使掩模产生热畸变。

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Distortion: (1) an undesirable change in the characteristics of a visual image, such as those images appearing at the corners of a cathode ray tube.

畸变：(1)视觉影像所产生的不良变化。例如阴极射线管的壁角上的影像。

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So it is necessary to correct such images. In this paper I consider the causes of the geometric distortion in X-ray images, and apply the camera calibration into the X-ray image correction.

然而一般的X射线仪采集到的图像都存在几何畸变，引起分析过程中的误差，因此有必要对从X射线仪获取的图像进行几何校正。

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