Taking a measure and control of temperature, flow and pressure for the small device by AI intelligent regulator, flow controller. Pressure transmitter, etc, the effect is perfect .
采用AI智能调节器、流量控制器、压力变送器等。对小型装置的温度、流量、压力等参数实行测量与控制，效果良好。
In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
具体地说，提供用来补偿流动路径和质量流量控制器的压力环境中的压力瞬变现象的方法和系统。
A new principle is adopted in designing low pressure MOCVD equipment. The principle is that the pressure is set and controlled separately in outlet and inlet of gas line of mass flow controller.
采用了一种新的设计原理，即以流量计为基准，将气体入口端和出口端压力双重分别统一控制，进行了低压MOCVD设计。
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