This article will focus on the practical problems faced by the areas of IC manufacturing equipment, research high-acceleration and high-precision linear motor for scan.
本文将围绕IC装备制造领域所面临的实际问题，开展用于扫描的高加速度高精度的宏动直线电机的研究工作。
This grinder use electric spindle which hold by ceramic ball bearing as high-speed spindle system, and use linear motor as precision feed system.
该磨床选用陶瓷球轴承电主轴作为高速主轴系统，利用直线电机作为高速精密进给系统。
Linear switched reluctance motor (LSRM) has never been a popular choice for high precision and high speed motion actuator.
线性开关磁阻电动机的结构简单可靠，对于高精度和快速加工执行器是最好的选择。
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