The influence of chamber pressure, gas flow rate and RF power on micro loading effect in reactive ion etch of silicon dioxide is researched.
对二氧化硅反应离子刻蚀中反应室压力,刻蚀气体流量和射频功率等因素对刻蚀速率和刻蚀均匀性的影响进行了研究。
As to the loading board part, many design methods are introduced, such as master-slave communication, input signal detection, status displaying, manual action, power supply and so on.
在载车板控制单元中,分别介绍了主从机通信、输入信号检测、状态显示、手动功能以及电源的设计方法。
In the ice calamity accident of power grid on beginning of 2008, the common condition in the accident of transmission line was the ice loading on earth wire fittings and insulators.
在2008年初的电网冰灾事故中,导地线金具和绝缘子覆冰掉串是输电线路事故中常见的情况。
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