Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。
This paper studies the work principle and structure of the rapid precision positioning system of 3D precision stage′s control system, and analyzes the system by theoretical and experimental methods.
对三维精密工作台快速定位系统的控制原理及结构组成进行了研究，并对系统进行理论和实验分析。
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