The development and experiments of electronic controlling system for variable rectangular E-beam lithography and lasser positioning stage are summed in the paper.
本文总结了用于可变矩形电子束曝光机激光定位工件台电控系统的研制及实验经验。
The drive system preferably includes a gear, gearbox, variable speed drive and at least one positioning sensor.
该驱动系统优选为包括齿轮、齿轮组、具有动力制动性能的变频驱动的马达、以及至少一个位置传感器。
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