For exact positioning of the emitter: the pilot beam indicates exactly which area will be X-rayed.
可精确定位发射器:导向射束可精确表明需进行X光检查的区域。
Pilot beam: for precise positioning of the emitter.
导向射束:可精确定位发射器。
The development and experiments of electronic controlling system for variable rectangular E-beam lithography and lasser positioning stage are summed in the paper.
本文总结了用于可变矩形电子束曝光机激光定位工件台电控系统的研制及实验经验。
应用推荐