平面扫视法
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Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed.
利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论。
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