... 抗化学变化陶瓷传感器110VAC电源适配器 VD83 100 到 5 x 10-4 mbar (75 到 5 x 10-4 Torr) 内置皮拉尼传感器（Pirani sensor） VD84/1 100 - 0.001 mbar 75 - 0.001 Torr 外置皮拉尼传感器（Pirani sensor）,数据记录功能;USB接口。
基于6个网页-相关网页
Chinese Journal of Sensors and Actuators 关键词： 皮拉尼传感器；CMOS 工艺； MEMS；微热板 [gap=669]Keywords: Pirani Sensor; CMOS technology; MEMS; Microhotplate
基于1个网页-相关网页
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
应用推荐