phosphorus-doping solid-phase efficiency 磷掺杂固相效率
3) There is difference between the furnace annealing and the rapid thermal annealing. 4) Phosphorus doping degenerates the crystalline ratio of deposited film but benefits recrystallization.
3)快速光退火与常规炉子退火的结果有一定的差异;4)磷掺杂导致沉积时晶化率降低,但对固相晶化有利。
参考来源 - 多晶硅薄膜制备工艺研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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