Generalized Phase-Shifting Interferometry 广义相移干涉术
Phase- shifting interferometry 相移干涉术
Mirau phase-shifting interferometry Mirau相移干涉
Wavelength phase-shifting interferometry 波长移相干涉技术
two wavelength phase shifting interferometry 相移干涉
Phase-shifting shearing interferometry 移相剪切干涉
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Phase shifting interferometry has been commonly applied as a high precision method in profile measurement.
相移干涉技术是表面轮廓测量领域中得到了广泛应用的可实现高精度测量的技术方法。
Phase shifting interferometry (PSI) is a high precise and sensitivity method in testing technology, especially in three-dimensions profile measurement.
移相干涉技术(PSI)是计量测试特别是三维形貌测量中高精度、高灵敏度的测量方法。
In this paper a new method of phase-stepping by changing the temperature of Laser Diode (LD) in phase Shifting Interferometry (PSI) has been presented.
提出利用改变半导体激光器温度来改变波长，在相移干涉仪中实现步进相移计量的新方法。
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