Make the ruling experiments for VLS grating using the phase scanning method. Analyze the ruling error primarily.

采用相位扫描方法进行了变栅距光栅的刻划实验，并对刻划误差进行了初步的分析。

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The experiments show that the phase scanning method is right and innovative and the ability of the sub-nanometer space increment is reached.

实验结果表明，本文捉出的相位扫描方法原理正确，具有创新性，达到了变栅距光栅所要求的亚纳米级的栅距变化精度。

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Our detector needs to maintain state only during the byte code scanning phase, because we're looking for a method-level problem.

我们的检测器只需要在字节码扫描阶段维护状态，因为我们查找的是方法级的问题。

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