相移掩模 - 引用次数：2参考来源 - 一种用于暗域交替式相移掩模设计的自适应版图划分方法 Adaptive Layou Partitioning for Dark Field Alternating Phase
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Phase-shift mask
abstract:A schematic illustration of various types of masks: (a) a conventional (binary) mask; (b) an alternating phase-shift mask; (c) an attenuated phase-shift mask.
Therefore, a new approximationmodelforalternatingphaseshiftmaskconsideringshadowingeffectswas proposedin this paper, and shadowing ratio was redefined.