It can be used as not only humidity and pressure sensing sensors, but also identifying many kinds of gases, mostly oxygen. This paper studys on TiO_2 oxygen-sensing thin films which are deposited by DC magnetron reaction sputtering.
本论文研究了采用直流磁控反应溅射法制备的TiO_2氧敏薄膜。
参考来源 - 直流磁控反应溅射制备TiO·2,447,543篇论文数据，部分数据来源于NoteExpress
Compared with pure TEOS sensing membrane, modified sensing membranes have better reproducibility and stability, which is more favorable for the detection of dissolved oxygen.
与纯teos敏感膜相比，有机改性敏感膜具有更好的重复使用性和稳定性，更有利于溶解氧的测量。
The sensors with this kind of sensing membranes for the detection of gas-phase oxygen and dissolved oxygen have short response time, high detection precision and good stability and reproducibility.
将该敏感膜组装到光纤氧传感器上，实现了对气态和溶解氧的检测，并具有响应快、稳定性和重复性较好等优点。
A novel method for preparation of oxygen sensing film has been proposed.
提出一种制备氧感应膜的最佳成分及方法。
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