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optical proximity correction

  • 光学近接校正:一种用于半导体光刻制程中的技术,通过对掩模图案进行修改,以减小光刻过程中的图像失真。

网络释义专业释义英英释义

  光学距离校正

... optical processor 光学处理器 optical proximity correction (OPC) 光学距离校正 optical receiver 光学接收器 ...

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  光学邻近效应修正

...米微影;除非严格控管并加上解析度辅助技术,如相位移光罩(phase shift mask)、光学邻近效应修正(optical proximity correction)与偏轴照明(off-axis illumination)等技术。但无 论如何,要利用光学微影 技术达到次70奈米解析度 仍然是一大挑战。

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  校正

相对光学近似校正optical proximity correction, OPC)和设计规则来说,Intel的模型技术更进一步,可以采用名义上落后一个工艺代的设备制造芯片。

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  光学近似修正

IBM认为,通过光学近似修正Optical Proximity Correction,OPC)技术,硅基底和SOI模块均可采用248纳米步进机(Stepper),而不需使用较昂贵的193纳米微影...

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短语

OPC Optical Proximity Correction 光学临近修正

Method of optical proximity correction 发明名称

Model-Based Optical Proximity Correction 基于模型的光学邻近校正技术

optical proximity effect correction 光学邻近效应修正

 更多收起网络短语
  • 光学邻近修正
    光学邻近效应修正

·2,447,543篇论文数据,部分数据来源于NoteExpress

Optical proximity correction

  • abstract: Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to the limitations of light to maintain the edge placement integrity of the original design, after processing, into the etched image on the silicon wafer.

以上来源于: WordNet

权威例句

  • To further hone the image, engineers use a technique called optical proximity correction, which uses oddly shaped bars, notches and other distortions that are cut into the chrome template on the quartz plate to trick light waves into making a more precise pattern (see left).

    FORBES: Trick Of The Light

  • To further hone the image, engineers use a technique called optical proximity correction, which uses oddly shaped bars, notches and other distortions that are cut into the chrome template on the quartz plate to trick light waves into making a more precise pattern (see chart).

    FORBES: Trick of the Light

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