The simple linear relationship between off-axis distance and delay time was also derived in the case of paraxial and remote transmission.
在近轴、远距离传输情况下的离轴距离与延迟时问成简单的线性关系。
A new design of off-axis five mirrors optics was presented which was used to extreme-ultraviolet lithography. It was very suit for the commercialization at optical quality and free work distance.
本文探讨了一种可应用于极紫外光刻光学系统的离轴五反射镜系统,它在光学质量、自由工作距离方面满足了极紫外光刻商业化的要求。
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