Therefore, a new approximation model for alternating phase shift mask considering shadowing effects was proposed in this paper, and shadowing ratio was redefined.
因此本文针对交替式相移掩模，提出了一种考虑阴影效应的近似模型。
In this paper, a new model reduction method is developed from the viewpoint of optimal approximation to the energy.
本文从能量最优逼近的角度论述了一种新的模型降阶方法。
Performances of approaching and approximate error were given for the new smooth function, as well as the study of convergence and the approximation limit of optimum for the new model.
还给出了新光滑函数的逼近性能和精度分析以及新模型的收敛性证明和最优解的逼近上限。
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