Standing wave is parasitic effect of exposure, generated by multi reflection and interference of rays vertically incident upon parallel medium layers.
驻波是曝光中的寄生效应，是光线垂直入射到不同的平行平面介质层之间，经多次反射并干涉形成的。
Beside filtering interference signals and extract effective signals, it is a difficult problem to study the separation of multi-signal of sound wave and vibration.
在实际测量过程中，除了过滤干扰信号，提取有效信号外，多振动源信号分离是本文研究的一个难点。
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