The composition generally changes from alloy cathode target to alloy coating deposited by multi arc ion plating to some extent.
采用多弧离子镀制备的合金涂层成分与合金阴极靶之间通常存在一定程度的偏差。
A multi-cathode metal vapor vacuum arc (WEVVA) ion source has been designed. It contains an array of 18 cathodes, any of which can be switched into operation rapidly while under vacuum.
设计了一台多阴极的金属蒸气真空弧离子源，它有18个阴极，任一阴极都能在真空状态下被迅速接入电路工作。
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