CeO2对2024铝合金显微组织和力学性能的影响 关键词：CrC；中频磁控溅射；离子源；附着力 [gap=1152]Key words: CrC; mid-frequency magnetron sputtering; ion source; adhesion
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mid-frequency alternative reactive magnetron sputtering 中频交流反应磁控溅射
mid-frequency AC magnetron sputtering 中频交流磁控溅射
mid-frequency dual-magnetron sputtering 中频对靶磁控溅射
mid-frequency pulse magnetron sputtering 中频脉冲磁控溅射
mid-frequency pulsed magnetron sputtering 中频脉冲磁控溅射
mid frequency reactive magnetron sputtering 中频交流磁控溅射
mid frequency alternative magnetron sputtering 中频交流磁控溅射
Mid-frequency dual-magnetron reactive sputtering 中频孪生靶反应溅射
Mid-frequency direct current magnetron sputtering 中频直流反应磁控溅射
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Diamond-like carbon DLC thin films were deposited onto si 100 and high speed steel substrates by mid-frequency magnetron sputtering system SP0806AS, Beijing Power tech Co.
采用SP0806AS中频磁控溅射镀膜机，在硅(100)和高速钢基体上，采用双石墨靶在不同功率下沉积了类金刚石薄膜。
The hydrogen-free diamond-like carbon(DLC) films were deposited on substrates of Si and M2 high-speed steel using a new mid-frequency dual-magnetron sputtering.
利用新型中频对靶磁控溅射在硅和M2高速钢基体上沉积了一系列无氢含铬类金刚石膜。
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