...),Chen Di(陈迪),Ding Guipu(丁桂甫),Zhao Xiaolin(赵小林),Yang Chunsheng(杨春生).Microfabrication Technology(微细加工技术),2002,(2):28~32
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Some new technologies of micro-mechanism manufacture are discussed, such as microfabrication technology for surface/bulk, LIGA and silicon direct bonding technologies and so on. Besides, the application foreground in MEMS products using these new technologies is also expounded.
论述了微电子机械制造中的主要技术,包括表面微细加工、体微细加工、光刻-电铸-注塑(LIGA)、硅直接键合技术等,并讨论了这些新技术在MEMS产品中的应用前景。
参考来源 - 微/纳米级微电子机械系统制造新技术·2,447,543篇论文数据，部分数据来源于NoteExpress
Other techniques involve huge lumps of machinery, but Josephson junctions can be made using the sort of microfabrication technology employed for normal silicon chips.
其他技术都需要一堆巨大的机械装置，而约瑟夫森结则可以通过运用利用普通硅芯片的微型装配技术得到。
Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc.
系统介绍了芯片实验室的各种制备技术，这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。
Microfabrication of periodic structures by holographic lithography technology combining with visible laser-induce photopolymerization is developed in this paper.
本文报道用激光全息技术结合可见光光聚合制作周期结构的方法和物理机制；
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