Sharp, one of its rivals, recently said that it had developed new microfabrication techniques to build DMFCs with the highest power densities yet achieved.
夏普，它的一个竞争对手，最近说已开发出了新的微制造技术，用来制造迄今为止功率密度最高的DMFC。
Sharp , one of its rivals, recently said that it had developed new microfabrication techniques to build DMFCs with the highest power densities yet achieved.
夏普，它的一个竞争对手，最近说已开发出了新的微制造技术，用来制造迄今为止功率密度最高的DMFC。
The principle of process, characteristic and research status on the several typical microfabrication techniques used to fabricate MEMS devices are given a review in this paper.
文章综述了用于制备MEMS器件的几种典型微细加工技术的工艺原理、特点以及研究现状，并展望了这些微细加工技术的发展前景。
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