To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
According to dimension measurement requirement of micro structure, a measurement system combined by MEMS micro tactile probe and nanomeasuring machine is constructed.
针对微小结构几何量测量的需求，通过集成MEMS微触觉测头和纳米测量机构建了高精度的测量系统。
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