Traditional Radioisotope micro Battery (RMB) with direct conversion device of single layer array does not meet the requirements of micro sensor devices for its lower output power.
传统同位素微电池的能量转换结构采用单层阵列形式，造成电池输出功率较小，不能满足微型传感器件的需求。
This design proposal of micro pressure sensor array can effectively meeting the measuring requirement of boundary - layer separation point, and expand engineering applied scope of MEMS devices.
设计的微型压力传感器阵列可有效满足边界层分离点的检测要求，进一步拓展了MEMS器件的工程应用范围。
As a new type device, the micro thermoelectric devices have been used as cooler, generator and sensor.
作为新型的热电器件，微型热电器件在发电、制冷和传感器等领域获得了重要应用。
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