Multi-functional Nano-micro-probe Mechanical System 纳米显微力学探针系统
According to dimension measurement requirement of micro structure, a measurement system combined by MEMS micro tactile probe and nanomeasuring machine is constructed.
针对微小结构几何量测量的需求，通过集成MEMS微触觉测头和纳米测量机构建了高精度的测量系统。
Objective to probe into practicality of micro-needling system.
目的：探讨微针系统的实用性。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
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