micro mechanical component
micro mechanical component
微机械部件
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
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