micro machined inertial sensors
micro machined inertial sensors
微型机械惯性传感器
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
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