Micro-gas flow measurement 微小气体流量检测
micro-scale gas flow 微尺度流动
gas micro-flow 气体微流量
gas micro-flow leak rate 气体微流量
micro-and nanoscale gas flow 微纳米尺度流动
Gas mixing is one of the most important applications in micro flow systems.
气体混合是微流动系统的重要应用之一。
Based on the Reynold's equations with the micro scale effects considered, a new kind of approximate algorithm for the inner flow of the spiral grooved gas seals was set up in this paper.
本文引用考虑微尺度效应的雷诺方程，推导出了考虑微尺度效应的螺旋槽干气密封内部流动的近似算法。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
结果表明，通过对反应室压力、刻蚀气体流量和射频功率的调节，可以降低微负载效应的影响，得到良好的刻蚀均匀性。
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