A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
Magnetic micro inductor is a new kind of on-chip device, which has a better characteristic, and is compatible with the standard CMOS IC fabrication technology.
磁介质微电感是一种新的片上器件，拥有较高的电感性能，并能够与标准CMOS IC工艺兼容。
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