The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
A method is presented to manipulate microspheres using liquid bridge forces to overcome the influence of adhesion during micro-electro-mechanical system assembly.
为了克服粘着对微机电系统装配的影响，提出了一种利用液体桥力实现微球转移操作的方法。
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