Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).

介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。

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DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS (laser direct writing system), similar to the way manufacturing micro electronics.

采用类似于微电子加工手段的激光辅助制造技术——激光直写技术，可以制作具有高衍射效率的DOE。

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The modal testing of vibration isolation system of the micro-manufacturing platform is made.

对微制造平台隔振系统进行了实验模态分析。

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