他强调，国内的学术界透过这个异质整合设计平台，可扩大研究范围至微镜面 (Micro-mirror) 、微感测(Micro-sensor) 元件、高品质被动元件及生物医学微机电系统 (Bio-MEMS)等主题，研究成果将可应用于天然灾害预警控制及医...
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GLARING MICRO MIRROR-FINISH 精细镜面研磨釉 ; 精细研磨釉
micro mirror 微反射镜
digital micro mirror devices 位微镜元件
Thin-film Micro-mirror array 薄膜微镜阵列
MEMS micro-mirror MEMS微镜
movable micro-mirror 可移动微反射镜
digital micro-mirror 数字微镜
Optimal design of F-P MCIRDA has been achieved and structure parameters of movable micro-mirror has been determined by theoretical analysis.
通过理论分析，完成了F-P MCIRDA的优化设计，确定了可动微镜的结构参数。
参考来源 - 微机械法布里A novel adjustable focal length optical adaptive micro-mirror based on MOEMS is presented.
本文提出了一种基于微光机电技术的可调焦微光学自适应微反射镜。
参考来源 - 基于微光机电系统的微光学自适应微镜的研究Two typical MEMS devices, Micro-Switch and Micro-Mirror, are designed, including structure, process and driving principle. Simulation of two devices was carried out, which included electricity and stress-strain analysis.
设计了两种典型的MEMS器件微开关和微镜,包括结构和工艺,以及它们的驱动原理,对两种器件的加工工艺进行了详细的阐述。
参考来源 - MEMS器件的计算机辅助设计与模拟方法研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Optimal design of F-P MCIRDA has been achieved and structure parameters of movable micro-mirror has been determined by theoretical analysis.
通过理论分析，完成了F - P MCIRDA的优化设计，确定了可动微镜的结构参数。
The micro-mirror fiber-optic hydrogen sensor is a kind of optical sensor with simple structure, high sensitivity, strong stability, and good reusability.
微透镜型光纤氢气传感器结构设计简单、灵敏度高、响应速度快，并且可以进行多次复用。
Significantly, the former two-class nature frequency expressions for the micro-mirror cell structure are put forward for the first tine, which are compared with the results from FEM analysis.
首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。
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